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Hybrid platform for high-tech equipment protection against earthquake and microvibration

机译：用于高科技设备的抗地震和微振动的混合平台

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摘要

To ensure the high quality of ultra-precision products such as semiconductors and optical microscopes, high-tech equipment used to make these products requires a normal working environment with extremely limited vibration. Some of high-tech industry centres are also located in seismic zones: the safety of high-tech equipment during an earthquake event becomes a critical issue. It is thus imperative to find an effective way to ensure the functionality of high-tech equipment against microvibration and to protect high-tech equipment from damage when earthquake events occur. This paper explores the possibility of using a hybrid platform to mitigate two types of vibration. The hybrid platform, on which high-tech equipment is installed, is designed to work as a passive isolation platform to abate mainly acceleration response of high-tech equipment during an earthquake and to function as an actively controlled platform to reduce mainly velocity response of high-tech equipment under normal working condition. To examine the performance of the hybrid platform, the analytical model of a coupled hybrid platform and building system incorporating with magnetostrictive actuators is established. The simulation results obtained by applying the analytical model to a high-tech facility indicate that the proposed hybrid platform is feasible and effective.
机译：为了确保超精密产品（例如半导体和光学显微镜）的高质量，用于制造这些产品的高科技设备要求在正常工作环境下振动极为有限。一些高科技工业中心也位于地震区：地震事件中高科技设备的安全性成为一个关键问题。因此，迫切需要找到一种有效的方法来确保高科技设备的抗微振动功能，并在发生地震事件时保护高科技设备免受损坏。本文探讨了使用混合平台减轻两种类型振动的可能性。装有高科技设备的混合平台旨在用作被动隔离平台，以减轻地震过程中高科技设备的主要加速度响应，并充当主动控制平台以主要降低高地震速响应。正常工作条件下的高科技设备。为了检查混合平台的性能，建立了结合了磁致伸缩执行器的混合平台和建筑系统的分析模型。通过将分析模型应用于高科技设备获得的仿真结果表明，该混合平台是可行和有效的。

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