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Single chip melds MEMS-based gyro sensor, electronics

机译:单芯片融合基于MEMS的陀螺仪传感器,电子设备

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Norwood, Mass. - Analog Devices Inc. said last week that it has succeeded in combining a micro-electromechanical systems (MEMS)-based gyro sensor structure and its requisite signal-conditioning circuitry on a single chip. Until now, angular rate-sensing gyroscopes have been available only in two-chip configurations, with a mechanical gyro and signal-processing electronics on two separate pieces of silicon. The benefits of the single chip, according to David Krakauer, program manager for gyro products, include size, cost, reliability and accuracy. "Using our surface micro-machining process, we've learned how to manufacture MEMS devices so as to maximize our yield on the analog, the digital and the mechanical portions, and to optimize our assembly and test operations," he said. "Any two-chi p device is bound to have a lower yield, and yield has an obvious impact on cost."
机译:马萨诸塞州诺伍德市-Analog Devices Inc.上周表示,已成功将基于微机电系统(MEMS)的陀螺仪传感器结构及其必需的信号调理电路集成在单个芯片上。到目前为止,角速率感应陀螺仪仅在两芯片配置中可用,在两个单独的硅片上具有机械陀螺仪和信号处理电子设备。陀螺仪产品程序经理David Krakauer表示,单芯片的好处包括尺寸,成本,可靠性和准确性。他说:“通过使用表面微加工工艺,我们已经学会了如何制造MEMS器件,从而最大程度地提高了模拟,数字和机械部分的产量,并优化了组装和测试操作。” “任何两分频器件必定具有较低的良率,良率对成本有明显的影响。”

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