Low-loss on-chip transmission lines with micro-patterned artificial dielectric shields

Ma Y.; Rejaei B.; Zhuang Y.

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Low-loss on-chip transmission lines with micro-patterned artificial dielectric shields

机译：具有微图案人工介电屏蔽的低损耗片上传输线

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摘要

Low-loss coplanar waveguide (CPW) transmission lines integrated on a standard (5 -10 Omega ldr cm) silicon substrate are realised by using an artificial dielectric shield with a very high in-plane dielectric constant. The shield consists of a 30 nm-thick Al2O3 film sandwiched by two 100 nm-thick aluminium layers patterned into lattices of mum-size elements. The individual metallic elements are micro-patterned to suppress the flow of eddy currents at microwave frequencies. Inserted below the CPW, the shield blocks the electric field of the line from entering the silicon substrate. The resulting line attenuation (measured up to 25 GHz) is comparable to that of identical CPWs built on a high-resistivity silicon wafer.

机译：通过使用具有非常高的面内介电常数的人造介质屏蔽层，可以将集成在标准（5 -10Ωldr cm）硅基板上的低损耗共面波导（CPW）传输线实现。屏蔽层由厚度为30 nm的Al2O3膜组成，中间夹有两个100 nm厚的铝层，这些铝层被图案化为妈妈大小的元素的格子。各个金属元素都经过微细图案化，以抑制微波频率下的涡流。屏蔽层插入CPW下方，可阻止线路的电场进入硅基板。所产生的线路衰减（测量高达25 GHz）与在高电阻率硅晶圆上构建的相同CPW相当。

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来源
《Electronics Letters》 |2008年第15期|p.913-914|共2页
作者
Ma Y.; Rejaei B.; Zhuang Y.;
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作者单位

Delft Inst. of Microsyst. & Nanoelectron. (DIMES), Tech. Univ. Delft, Delft;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
coplanar transmission lines; coplanar waveguides; eddy currents; electric fields; microwave integrated circuits; system-on-chip; Al2O3; Si; coplanar waveguide; electric field; high-resistivity silicon wafer; low-loss on-chip transmission lines; micropatterned artificial dielectric shield; microwave frequency; size 100 nm; size 30 nm;

机译：共面传输线;共面波导;涡流;电场;微波集成电路;片上系统;Al2O3;Si;共面波导;电场;高电阻率硅晶片;低损耗片上传输线;微图案化人工介质屏蔽;微波频率;尺寸100 nm;尺寸30 nm;

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专利

1. Low-loss on-chip transmission lines with micro-patterned artificial dielectric shields [J] . Y. Ma, B. Rejaei, Y. Zhuang Electronicsletters . 2008,第15期

机译：具有微图案人工介电屏蔽的低损耗片上传输线
2. Artificial Dielectric Shields forIntegrated Transmission Lines [J] . Ma Y., Rejaei B., Zhuang Y. IEEE microwave and wireless components letters . 2008,第7期

机译：集成输电线路用人工介电屏蔽
3. Low-Loss Patterned Ground Shield Interconnect Transmission Lines in Advanced IC Processes [J] . Luuk F. Tiemeijer, Ralf M. T. Pijper, Ramon J. Havens, IEEE Transactions on Microwave Theory and Techniques . 2007,第期

机译：先进IC工艺中的低损耗图案化接地屏蔽互连传输线
4. Wafer Level Packaging Technology for Low-Loss On-chip Transmission Lines and Inductors [C] . G. Carchon, X. Sun, W. De Raedt, Microelectronics . 2003

机译：低损耗片上传输线和电感器的晶圆级封装技术
5. Novel low-loss microwave and millimeter-wave planar transmission lines. [D] . Lu, Yuyuan. 1999

机译：新型低损耗微波和毫米波平面传输线。
6. Hybrid Dielectric-loaded Nanoridge Plasmonic Waveguide for Low-Loss Light Transmission at the Subwavelength Scale [O] . Bin Zhang, Yusheng Bian, Liqiang Ren, -1

机译：混合电介质加载纳米脊等离子波导管可在亚波长范围内实现低损耗光传输
7. Hybrid Dielectric-loaded Nanoridge Plasmonic Waveguide for Low-Loss Light Transmission at the Subwavelength Scale [O] . Bin Zhang, Yusheng Bian, Liqiang Ren, 2017

机译：混合电介质负载纳芯等离子体波导，用于在亚波长尺度处的低损耗光传输
8. Low-Loss Flexible Dielectric Waveguide for Millimeter-Wave Transmission and Its Application to Devices [R] . Bridges, W. B. 1984

机译：用于毫米波传输的低损耗柔性介质波导及其在器件中的应用

Low-loss on-chip transmission lines with micro-patterned artificial dielectric shields

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