Properties of TiN/Mo nanolayers, produced using vacuum-arc method

W.M. Beresnev; A.D. Pogrebniak; T. Karwat; T. Kozak

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Properties of TiN/Mo nanolayers, produced using vacuum-arc method

机译：真空电弧法制备的TiN / Mo纳米层的性能

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It was investigated the possibilities of produce of TiN/Mo nanolayers from the metal atom plasma stream. The influence of deposition parameters on the structure and properties of the layers have been analyzed.

机译：研究了由金属原子等离子体流生产TiN / Mo纳米层的可能性。分析了沉积参数对层结构和性能的影响。

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《Przeglad Elektrotechniczny》 |2008年第3期|p.207-208|共2页
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W.M. Beresnev; A.D. Pogrebniak; T. Karwat; T. Kozak;
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正文语种 eng
中图分类电工技术;
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Properties of TiN/Mo nanolayers, produced using vacuum-arc method

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