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Performance analysis and improvement of air filtration and ventilation process in semiconductor clean air-conditioning system

机译：半导体清洁空调系统中空气过滤和通风过程的性能分析及改进

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摘要

The air-conditioning system in modern industrial cleanrooms can be very energy intensive due to large air change rates per hour and high airflow resistance. This study focuses on the actual performance and potential improvements of the filtration and ventilation process in cleanrooms. On-site measurements were conducted in three semiconductor cleanrooms to investigate the actual performance of clean air-conditioning systems. The results reveal that the unmatched particle concentrations of outdoor air and return air increase the filtration load. The indoor workshops are often guaranteed excessively, leading to large amount of redundant airflow rates. Both make the actual ventilation system energy intensive. Therefore, a new air filtration and ventilation system in industrial cleanrooms is introduced in this research. The proposed system filters outdoor air and return air separately before mixture and avoids their mixing loss. It indicates that 25.8% to 45.0% of the total energy can be reduced due to lower airflow resistance. Proper return airflow rate of the cleanrooms are proposed to avoid airflow redundancy, and as a result, 32.9% to 50.7% of potential energy can be saved compared with the original system. (C) 2020 Elsevier B.V. All rights reserved.
机译：现代工业洁净室中的空调系统由于每小时的空气变化率大，气流耐受性大而导致的能量密集。本研究重点介绍洁净室中过滤和通风过程的实际性能和潜在改进。在三个半导体洁净室中进行现场测量，以研究清洁空调系统的实际性能。结果表明，室外空气的无与伦比的颗粒浓度增加了过滤负荷。室内车间通常会过度保证，导致大量的冗余气流速率。两者都使实际的通风系统能量密集。因此，本研究介绍了工业洁净室的新型空气过滤和通风系统。所提出的系统过滤室外空气并在混合物之前单独返回空气，并避免它们的混合损失。表示由于气流阻力下降，可以降低25.8％至45.0％的总能量。提出了适当的返回洁净室的气流率，以避免气流冗余，结果，与原始系统相比，可以节省32.9％至50.7％的潜在能量。 （c）2020 Elsevier B.v.保留所有权利。

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