Elastic Suspension of a Superminiature MEMS Gyro

V. E. Dzhashitov; V. M. Pankratov

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Elastic Suspension of a Superminiature MEMS Gyro

机译：微型MEMS陀螺仪的弹性悬架

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This paper considers a superminiature MEMS gyro with a volume of the sensor and suspension of less than 0.2 mm~3 Mathematical models for calculating and analyzing the natural frequencies of the distributed system elastic suspension-sensitive element of a MEMS gyro were constructed and analyzed. The required algorithms and software were developed. The determined resonance frequencies enable automatic selection of the geometric parameters of elastic suspension, which provide the sensor resonance tuning. I he influence of manufacturing tolerances on the suspension characteristics was estimated.

机译：本文考虑了传感器体积和悬架小于0.2 mm〜3的超微型MEMS陀螺仪。建立并分析了计算和分析MEMS陀螺仪分布式系统弹性悬架敏感元件固有频率的数学模型。开发了所需的算法和软件。确定的共振频率可以自动选择弹性悬架的几何参数，从而提供传感器共振调整。估计了制造公差对悬架特性的影响。

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《Gyroscopy and navigation》 |2011年第4期|p.239-246|共8页
作者
V. E. Dzhashitov; V. M. Pankratov;
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作者单位

Precision Mechanics and Control Institute, Russian Academy of Sciences, Saratov, Russia;

Precision Mechanics and Control Institute, Russian Academy of Sciences, Saratov, Russia;

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Elastic Suspension of a Superminiature MEMS Gyro

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