Use of Post-Ionisation Techniques to Complement SIMS Analysis. A Review With Practical Aspects.

H. J. Mathieu; D. Leonard

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Use of Post-Ionisation Techniques to Complement SIMS Analysis. A Review With Practical Aspects.

机译：使用后电离技术补充SIMS分析。实用方面的评论。

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Various ionization techniques for Secondary Neutral Mass Spectrometry (SNMS) (e-beam SNMS, plasma SNMS, laser SNMS in the non resonant and resonant Modes) are reviewed as well as their ability to Complement Secondary Ion Mass Spectrometry (SIMS). After a brief introduction on the basic principles of SIMS and SNMS, the ionization techniques are Compared in terms of their useful yield and ionization Efficiency. Several applications from the literature for Spectroscopic, imaging and profiling will be given.

机译：综述了用于次级中性质谱（SNMS）的各种电离技术（电子束SNMS，等离子体SNMS，非共振和共振模式下的激光SNMS），以及它们补充次级离子质谱（SIMS）的能力。在简要介绍了SIMS和SNMS的基本原理之后，比较了电离技术的有用产率和电离效率。将从文献中获得光谱，成像和轮廓分析的几种应用。

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《High Temperature Materials and Processes》 |1998年第2期|p.29-44|共16页
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H. J. Mathieu; D. Leonard;
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中图分类金属学与热处理;
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Use of Post-Ionisation Techniques to Complement SIMS Analysis. A Review With Practical Aspects.

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