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Toward Spectral-Domain Optical Coherence Tomography on a Chip

机译:在芯片上实现光谱域光学相干层析成像

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We present experimental results of a spectral-domain optical coherence tomography system based on an integrated optical spectrometer. A 195-channel arrayed-waveguide-grating (AWG) spectrometer with 0.4-nm channel spacing centered at 1300 nm and a 125-channel AWG with 0.16-nm channel spacing centered at 800 nm have been fabricated in silicon oxynitride waveguide technology. Interferometric distance measurements have been performed by launching light from a broadband source into a free-space Michelson interferometer, with its output coupled into the AWG. A maximum imaging depth of 1 mm and axial resolution of 25 and 20 μm in air are demonstrated for the 800- and 1300-nm ranges, respectively.
机译:我们提出了基于集成光谱仪的光谱域光学相干断层扫描系统的实验结果。用氮氧化硅波导技术制造了一个以0.4nm的通道间距为1300 nm的195通道阵列波导光栅(AWG)光谱仪和一个以0.16nm的通道间距为800 nm的125通道AWG。干涉式距离测量是通过将来自宽带光源的光发射到自由空间迈克尔逊干涉仪中进行的,并将其输出耦合到AWG中。分别在800和1300 nm的范围内证明了最大成像深度为1 mm,在空气中的轴向分辨率为25和20μm。

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