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首页> 外文期刊>IEEE journal of selected topics in quantum electronics >Fabrication and performance of two-dimensional matrix addressable arrays of integrated vertical-cavity lasers and resonant cavity photodetectors
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Fabrication and performance of two-dimensional matrix addressable arrays of integrated vertical-cavity lasers and resonant cavity photodetectors

机译：集成垂直腔激光器和谐振腔光电探测器的二维矩阵可寻址阵列的制造和性能

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摘要

Massively parallel interconnects and scannerless imaging are applications that would benefit from high-density two-dimensional arrays of lasers. Vertical-cavity surface-emitting lasers (VCSELs) are uniquely suited for these applications due to their small size and high efficiency. We have successfully fabricated 64 × 64 element arrays containing alternating rows of selectively-oxidized 850 nm VCSELs and resonant-cavity photodetectors (RCPDs) monolithically integrated on semi-insulating GaAs substrates. In order to reduce the input and output connections to the array, we employ a matrix addressable architecture, where all the VCSELs (or RCPDs) in each row are connected by a common metal trace at the base of their mesas. The columns are connected by metal traces that bridge from mesa top to mesa top, connecting every other row (i.e., only VCSELs or only RCPDs). The pitch of devices in the array is 55 Μm, and the total resistance contributed by the long (up to 3.5 mm) row and column traces is below 50 Ω. The design, fabrication, and performance of these arrays are discussed.
机译：大规模并行互连和无扫描仪成像是将从高密度二维激光器阵列中受益的应用。垂直腔面发射激光器（VCSEL）尺寸小，效率高，特别适合这些应用。我们已经成功地制造了64×64元件阵列，其中包含交替行的选择性氧化的850 nm VCSEL和单腔集成在半绝缘GaAs衬底上的谐振腔光电检测器（RCPD）。为了减少到阵列的输入和输出连接，我们采用矩阵可寻址架构，其中每行中的所有VCSEL（或RCPD）均通过位于其台面底部的公共金属走线连接。这些列由从台面顶部跨到台面顶部的金属走线连接，每隔一行连接（即，仅VCSEL或仅RCPD）。阵列中器件的间距为55微米，长（至3.5 mm）行和列走线所贡献的总电阻低于50Ω。讨论了这些阵列的设计，制造和性能。

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