Slow-wave lines in a meander configuration, fabricated with multilayer MMIC technologies, are proposed, and their performance is investigated experimentally. Multilayer construction of capacitive triplate lines allows reduction of the chip area of periodic slow-wave line circuits. With this design, less than one half of the area of conventional straight slow-wave lines is required. Additionally, it permits higher frequency operation up to 40 GHz with a negligible dispersion.
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