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首页> 外文期刊>IEEE Transactions on Magnetics >Novel sputtering process to reduce the grain size and its distribution in Co-based longitudinal thin film media-new seedlayer and high K/sub u//sup Grain/ material
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Novel sputtering process to reduce the grain size and its distribution in Co-based longitudinal thin film media-new seedlayer and high K/sub u//sup Grain/ material

机译：减少钴基纵向薄膜介质中晶粒尺寸及其分布的新型溅射工艺-新型籽晶层和高K / sub u // sup晶粒/材料

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摘要

To reduce the grain size and its distribution, two kinds of new techniques have been introduced. In the first one, a new WCr seedlayer combined with dry-etching process was found to be effective in reducing the grain size of the magnetic layer while maintaining the intergranular magnetic interactions. As a result, the media signal to noise ratio is significantly increased. In the second one, the usage of a Co co-precipitated NiP/Al plated layer combined with dry-etching and oxygen exposure processes was found to be effective to increase the media signal to noise ratio while maintaining the resolution and coercivity. A new ternary magnetic alloy of Co-Ge-Cr (85 at.% Co, 10 at.% Ge, 5 at.% Cr) was found to have the following magnetic properties: K/sub u//sup Grain/=3/spl times/10/sup 6/ erg/cm/sup 3/, H/sub k//sup grain/=10 kOe and 4/spl pi/M/sub k//H/sub k//sup grain/>1.0. This new magnetic material is a very promising candidate for use in high-density magnetic recording media.
机译：为了减小晶粒尺寸及其分布，已经引入了两种新技术。在第一个中，发现一种新的WCr籽晶层与干法蚀刻工艺相结合，可有效地减小磁性层的晶粒尺寸，同时保持晶间磁性相互作用。结果，大大提高了媒体信噪比。在第二篇文章中，发现将Co共沉淀的NiP / Al镀层与干法蚀刻和氧暴露工艺结合使用可有效提高介质信噪比，同时保持分辨率和矫顽力。发现一种新型的Co-Ge-Cr三元磁性合金（Co含量为85 at。％，Ge含量为10 at。％，Cr含量为5 at％）具有以下磁性：K / sub u // sup Grain / = 3 / spl times / 10 / sup 6 / erg / cm / sup 3 /，H / sub k // sup grain / = 10 kOe and 4 / spl pi / M / sub k // H / sub k // sup grain / > 1.0。这种新的磁性材料是用于高密度磁记录介质的非常有前途的候选材料。

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