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首页> 外文期刊>IEEE Transactions on Magnetics >Compositional separation of (Co-Cr-Pt)/Cr films for longitudinal recording and (Co-Cr)/Ti films for perpendicular recording
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Compositional separation of (Co-Cr-Pt)/Cr films for longitudinal recording and (Co-Cr)/Ti films for perpendicular recording

机译：纵向记录用（Co-Cr-Pt）/ Cr膜和垂直记录用（Co-Cr）/ Ti膜的成分分离

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摘要

Compositional separation of (Co-Cr-Pt)/Cr films for longitudinal recording and (Co-Cr)/Ti films for perpendicular recording were examined by high resolution scanning electron microscopy (SEM) combined with selective chemical etching of the films using dilute aqua regia. A 150-nm-thick Co-Cr film over Ti underlayer for perpendicular recording was examined with this method. The CP (chrysanthemum-like pattern) structures (Maeda et al., 1986) due to the compositional separation were clearly observed. (Co-Cr-Pt)/Cr films for longitudinal recording were also examined. Even in this case, it was also possible to observe the compositional separation by SEM. The effects of sputtering condition on compositional separation and magnetic properties of (Co-Cr-Pt)/Cr films were investigated.
机译：通过高分辨率扫描电子显微镜（SEM）结合使用稀水对膜进行选择性化学蚀刻，研究了用于纵向记录的（Co-Cr-Pt）/ Cr膜和用于垂直记录的（Co-Cr）/ Ti膜的成分分离里贾。用这种方法检查了Ti底层上用于垂直记录的150nm厚的Co-Cr膜。清楚地观察到由于成分分离而引起的CP（菊花状图案）结构（Maeda等，1986）。还检查了用于纵向记录的（Co-Cr-Pt）/ Cr膜。即使在这种情况下，也可以通过SEM观察组成分离。研究了溅射条件对（Co-Cr-Pt）/ Cr膜成分分离和磁性能的影响。

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