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首页> 外文期刊>IEEE Transactions on Magnetics >Improving Sensitivity and Resolution of Planar Magnetic Inductive Sensors by Optimizing Gap Between Magnetic Films
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Improving Sensitivity and Resolution of Planar Magnetic Inductive Sensors by Optimizing Gap Between Magnetic Films

机译：通过优化磁膜之间的差距来提高平面磁感应传感器的灵敏度和分辨率

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摘要

The sensitivity and resolution of the planar magnetic inductive sensors are enhanced by optimizing the gap between the upper and lower magnetic films. The tradeoff between the effect of the effective magnetic permeability and magnetic leakage of the magnetic films on the inductance of the sensor produces a gap that optimizes the sensor performance. This conclusion is verified theoretically and experimentally with the fabrication and testing of planar magnetic inductive sensors with given dimensions of magnetic films and planar spiral coil. From the analysis, the optimal gap (g) for our manufactured sensors with given dimensions is four times the magnetic film thickness (t). Experimentally, when g/t = 4, the inductance value, inductance ratio, and voltage sensitivity of sensors are all the largest. The sensitivity and resolution of the sensor with g/t = 4 are 1.81 mV/Oe and 50.23 nT at 500 kHz. Compared with the prototype whose magnetic films and planar coil are stacked tightly together, the sensitivity is increased by 43.72% and the resolution is improved by 33.51%. It is universally applicable that there is a gap that optimizes the performance of the planar magnetic inductive sensor.
机译：通过优化上磁膜之间的间隙来增强平面磁感应传感器的灵敏度和分辨率。磁膜的有效磁导率和磁泄漏对传感器电感的影响之间的折衷产生了优化传感器性能的间隙。在理论上和实验上，使用磁膜和平面螺旋线圈的尺寸的平面磁感应传感器的制造和测试进行了实验验证。从分析中，具有给定尺寸的制造传感器的最佳间隙（G）是磁膜厚度（T）的四倍。实验，当G / T = 4，传感器的电感值，电感比和电压敏感度都是最大的。具有G / T = 4的传感器的灵敏度和分辨率为1.81mV / OE，500 kHz为50.23nt。与磁膜和平面线圈紧紧堆叠在一起的原型相比，敏感性增加了43.72％，分辨率提高了33.51％。它普遍适用于有一个间隙，可优化平面磁感应传感器的性能。

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