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首页> 外文期刊>IEEE Transactions on Magnetics >Magnetic properties of sputtered bilayer and laminated CoZrRe/SiO/sub 2/ thin films
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Magnetic properties of sputtered bilayer and laminated CoZrRe/SiO/sub 2/ thin films

机译：溅射双层和层状CoZrRe / SiO / sub 2 /薄膜的磁性能

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Multilayered CoZrRe/SiO/sub 2/ films have been investigated in an effort to increase permeability of soft amorphous CoZrRe films at high frequencies. The effects of SiO/sub 2/ layering on coercivity, anisotropy and permeability are presented. The magnetic characteristics are dependent on the deposition parameters and thickness of both the CoZrRe and the SiO/sub 2/ layers. CoZrRe films with SiO/sub 2/ overlayers exhibit greater resistance to annealing with increasing SiO/sub 2/ input power. This is attributed to substrate heating with increasing input power that anneals the CoZrRe film during deposition. The coercivity of the multilayered films is less than that of a single CoZrRe layer. As the SiO/sub 2/ thickness increases, the coercivity of the multilayer film increases. These results are explained in terms of magnetostatic coupling between CoZrRe layers. Magnetooptic permeability measurements indicate good response at frequencies above 10 MHz for laminated films.
机译：已经研究了多层CoZrRe / SiO / sub 2 /薄膜，以提高高频下软质非晶态CoZrRe薄膜的磁导率。提出了SiO / sub 2 /分层对矫顽力，各向异性和磁导率的影响。磁特性取决于CoZrRe和SiO / sub 2 /层的沉积参数和厚度。带有SiO / sub 2 /覆盖层的CoZrRe膜随着SiO / sub 2 /输入功率的增加而表现出更大的抗退火性。这归因于在沉积过程中随着输入功率的增加而对基板进行加热，从而使CoZrRe薄膜退火。多层膜的矫顽力小于单个CoZrRe层的矫顽力。随着SiO / sub 2 /厚度的增加，多层膜的矫顽力增加。这些结果以CoZrRe层之间的静磁耦合来解释。磁光导磁率测量表明层压膜在10 MHz以上的频率下具有良好的响应。

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