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首页> 外文期刊>IEEE transactions on nanotechnology >Mechanical Properties Changes During Electrothermal RF Tuning in a Nanoelectromechanical Resonator
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Mechanical Properties Changes During Electrothermal RF Tuning in a Nanoelectromechanical Resonator

机译：纳米机电谐振器的电热射频调谐过程中的机械性能变化

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This paper demonstrates the electrothermal tuning of a nanoelectromechanical resonator correlated with the mechanical properties of an Al/SiC bilayer beam structure at radio frequencies under the moderate conditions. This study confirms a relatively low change in the quality factor ($Q$ -factor) over a wide range of frequency tuning (${Delta}f_{r}$ = 2.4 MHz). The effective stress of the beam plays an important role in the resonance frequency modulation and is critical to the $Q$-factor during electrothermal tuning. The $Q$-factor was decreased with the stress variation. However, the resonant frequency is linearly tuned on the basis of varied effective beam stresses and no major scarification of the $Q$-factor was observed.
机译：本文证明了在中等条件下，射频下纳米机电共振器的电热调谐与Al / SiC双层梁结构的机械性能相关。这项研究证实了在广泛的频率调谐范围内，品质因数（ $ Q $ 因子）的变化相对较低（ $ {Delta} f_ {r} $ = 2.4MHz）。光束的有效应力在共振频率调制中起着重要作用，并且对于 $ Q $ 因子至关重要电热调节。随应力变化， $ Q $ 因子减小。但是，谐振频率是根据变化的有效梁应力线性调整的，并且 $ Q $ -观察到因素。

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