Four Point Probe Structures With Buried and Surface Electrodes for the Electrical Characterization of Ultrathin Conducting Films

Groenland A.W.

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Four Point Probe Structures With Buried and Surface Electrodes for the Electrical Characterization of Ultrathin Conducting Films

机译：具有埋入式和表面电极的四点探针结构，用于超薄导电膜的电学表征

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Test structures for the electrical characterization of ultrathin conductive films are presented based on electrodes on which the ultrathin film is deposited. Two different designs are discussed: a novel design with buried electrodes and a conventional design with electrodes at the surface. This paper includes test structure design and fabrication, and the electrical characterization of atomic layer deposition TiN films down to 4 nm. We demonstrate that the novel test structures provide the same results as the conventional structures, and have the advantage of broader materials choice (i.e., conductor-dielectric combination). The proposed structures can be used successfully to characterize sub-10 nm films.

机译：基于其上沉积有超薄膜的电极，提出了用于超薄导电膜电特性测试的测试结构。讨论了两种不同的设计：一种具有埋入电极的新颖设计和一种在表面具有电极的常规设计。本文包括测试结构的设计和制造，以及原子层沉积低至4 nm的TiN膜的电学表征。我们证明了新颖的测试结构可提供与常规结构相同的结果，并且具有材料选择范围更广的优势（即导体-电介质组合）。所提出的结构可以成功地用于表征10 nm以下的薄膜。

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《Semiconductor Manufacturing, IEEE Transactions on》 |2012年第2期|p.178-184|共7页
作者
Groenland A.W.;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
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正文语种 eng
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1. Surface-Dependent Performance of Ultrathin TiN Films as an Electrically Conducting Li Diffusion lBarrier for Li-Ion-Based Devices [J] . Speulmanns Jan, Kia Alireza M., Kuehnel Kati, ACS applied materials & interfaces . 2020,第35期

机译：超薄锡膜的表面依赖性性能作为锂离子装置的电导率Li扩散Lbarrier
2. Preparation and characterization of polyoxometalate/protein ultrathin films grown on electrode surfaces using layer-by-layer assembly [J] . Jiang K, Zhang HX, Shannon C, Langmuir: The ACS Journal of Surfaces and Colloids . 2008,第7期

机译：层状组装在电极表面生长的多金属氧酸盐/蛋白质超薄膜的制备和表征
3. Preparation and characterization of polyoxometalate/protein ultrathin films grown on electrode surfaces using layer-by-layer assembly [J] . Jiang K, Zhang HX, Shannon C, Langmuir: The ACS Journal of Surfaces and Colloids . 2008,第7期

机译：层状组装在电极表面生长的多金属氧酸盐/蛋白质超薄膜的制备和表征
4. Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films [C] . Groenland A.W., Wolters R.A.M., Kovalgin A.Y., Microelectronic Test Structures, 2009. ICMTS 2009 . 2009

机译：具有埋入电极的四点探针结构，用于电学表征超薄导电膜
5. Electrical characterization of gold and platinum thin film electrodes with polyaniline modified surfaces. [D] . Aggas, John Richard. 2015

机译：具有聚苯胺改性表面的金和铂薄膜电极的电特性。
6. Optimizing ultrathin Ag films for high performance oxide-metal-oxide flexible transparent electrodes through surface energy modulation and template-stripping procedures [O] . Xi Yang, Pingqi Gao, Zhenhai Yang, -1

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7. Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films [O] . Groenland, A.W., Wolters, Robertus A.M., Kovalgin, Alexeij Y., 2009

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8. Permeation of Electroactive Solutes through Ultrathin Polymeric Films on Electrode Surfaces [R] . Ikeda, T., Schmehl, R., Denisevich, P., 1981

机译：电极表面超薄聚合物薄膜对电活性溶质的渗透

Four Point Probe Structures With Buried and Surface Electrodes for the Electrical Characterization of Ultrathin Conducting Films

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