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首页> 外文期刊>IEEE Transactions on Semiconductor Manufacturing >Development of a Web-Services-Based e-Diagnostics Framework for Semiconductor Manufacturing Industry
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Development of a Web-Services-Based e-Diagnostics Framework for Semiconductor Manufacturing Industry

机译：为半导体制造业开发基于Web服务的电子诊断框架

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摘要

Recently, the emerging Web-Services technology has provided a new and excellent solution to the data integration among heterogeneous systems. In this paper, a Web-Services-based e-diagnostics framework (WSDF) is proposed. It can achieve the automation of diagnostic processes and diagnostics information integration for semiconductor equipment. First, the system framework and the system component model are designed. Then, the object-oriented analysis and design of system components are accomplished. In particular, for the purpose of code reuse, several common functions, such as simple object access protocol communication, universal description discovery and integration registration, security mechanism, data exchange mechanism, and local database access, are built into a generic component called Web-Service agent. By inheriting the Web-Service agent, other system components can be constructed and have these common functions. In addition, a unified authentication-service mechanism and a safe network connection are also designed in the framework. WSDF is intended to support the e-diagnostics functions denned by International SEMATECH. It is believed that WSDF can be applied to construct e-diagnostics systems for the semiconductor manufacturing industry.
机译：最近，新兴的Web服务技术为异构系统之间的数据集成提供了一种新的出色的解决方案。本文提出了一种基于Web服务的电子诊断框架（WSDF）。它可以实现半导体设备诊断过程的自动化和诊断信息的集成。首先，设计了系统框架和系统组件模型。然后，完成了面向对象的系统组件分析与设计。尤其是出于代码重用的目的，一些通用功能（例如简单对象访问协议通信，通用描述发现和集成注册，安全性机制，数据交换机制以及本地数据库访问）内置于称为Web-服务代理。通过继承Web服务代理，可以构建其他系统组件并具有这些通用功能。此外，框架中还设计了统一的身份验证服务机制和安全的网络连接。 WSDF旨在支持国际SEMATECH定义的电子诊断功能。可以相信，WSDF可以用于构建半导体制造业的电子诊断系统。

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