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首页> 外文期刊>IEEE Transactions on Semiconductor Manufacturing >Family-based scheduling rules of a sequence-dependent wafer fabrication system
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Family-based scheduling rules of a sequence-dependent wafer fabrication system

机译：依赖序列的晶圆制造系统的基于族的调度规则

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摘要

Consider the dispatch problem for a wafer fabrication where production process is divided into hundreds of operations and takes a few months to complete. In the process, wafers have to go through similar operations several times repeatedly for different layers of circuit, called job re-entrances. General family-based scheduling rules are proved to perform better than the individual job scheduling rule in terms of machine utilization for multiserver and multiple job re-entrance manufacturing systems under the condition that with a positive possibility, a queue exists in front of steppers. Five special family-based scheduling rules are constructed, of which FCFS-F, SRPT-F, EDD-F, and LS-F are modified from previous well-known scheduling rules, while SDA-F is a rule-based algorithm, using threshold control and least slack principles. A simulation model is built to evaluate the performances of these five family-based rules by using the information collected from a wafer fab located in Hsin-Chu, Taiwan. As a result, SDA-F is shown to perform best among all five rules, followed by LS-F and FCFS-F.
机译：考虑一下晶圆制造中的调度问题，该晶圆制造过程将生产过程分为数百个操作，并且需要几个月的时间才能完成。在此过程中，对于不同的电路层，晶圆必须反复经历几次类似的操作，这称为作业重新进入。在多服务器和多作业重新制造系统的机器利用率方面，一般的基于家庭的调度规则被证明比单独的作业调度规则性能更好，前提是步进机前面有一个队列。构造了五种基于家庭的特殊调度规则，其中FCFS-F，SRPT-F，EDD-F和LS-F是从以前的知名调度规则中修改而来的，而SDA-F是使用以下规则的基于规则的算法阈值控制和最小松弛原则。利用从位于台湾新竹的晶圆厂收集的信息，构建了一个仿真模型来评估这五个基于家庭规则的性能。结果，显示SDA-F在所有五个规则中表现最佳，其次是LS-F和FCFS-F。

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