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首页> 外文期刊>IEEE Transactions on Semiconductor Manufacturing >A new accurate yield prediction method for system-LSI embedded memories
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A new accurate yield prediction method for system-LSI embedded memories

机译：系统LSI嵌入式存储器的精确准确的产量预测新方法

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The authors propose a new accurate yield prediction method for system-LSI embedded memories to improve the productivity of chips. Their new method is based on the failure-related yield prediction method in which failure bits in memory are tested to see whether they are repairable or not by using built-in redundancies. The important concept of the new method is called "repairable matrix'' (RM). In RM, rmij=1 means that i row redundancy sets and j column redundancy sets are needed for repair, where rmij is an element of the matrix. Here, RM can indicate all the candidate combinations of the number of row and column redundancy sets for repair. The new yield prediction method using RM solves two problems, "asymmetric repair'' and "link set.'' These have a significant effect on accurate yield prediction but have not yet been approached by conventional analytical methods. The calculation of yield by the new method is demonstrated in two kinds of advanced memory devices that have different design rules, failure situations, and redundancy designs. The calculated results are consistent with the actual yield. On average, the difference in accuracy between the new method and conventional analytical methods is about 5%.
机译：作者为系统LSI嵌入式存储器提出了一种新的精确的产量预测方法，以提高芯片的生产率。他们的新方法基于与故障相关的产量预测方法，该方法通过使用内置冗余来测试内存中的故障位，以查看其是否可修复。新方法的重要概念称为“可修复矩阵”（RM），在RM中，rmij = 1表示需要i行冗余集和j列冗余集进行修复，其中rmij是矩阵的元素。 ，RM可以指示要修复的行和列冗余集数量的所有候选组合，使用RM的新的产量预测方法解决了两个问题，即“非对称修复”和“链接集”。良率预测，但尚未被传统的分析方法所采用，在两种具有不同设计规则，故障情况和冗余设计的高级存储设备中演示了用新方法进行良率计算的结果，其结果与平均而言，新方法与传统分析方法之间的准确度差异约为5％。

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