• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Lateral Field Excitation of Thickness Longitudinal Mode and Shear Mode With ZnO Based on Solidly Mounted Resonator
【24h】

Lateral Field Excitation of Thickness Longitudinal Mode and Shear Mode With ZnO Based on Solidly Mounted Resonator

机译：基于固体谐振器的ZnO厚度纵向模式和剪切模式的横向场激励

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Coplanar electrodes are used with the c-axis-oriented piezoelectric film to form the pure longitudinal mode and the pure shear mode solidly mounted resonators (SMRs). Aluminum and molybdenum are used as electrode materials to achieve different excitation pure shear mode and pure longitudinal mode. There is no need to make a bottom electrode or etch the piezoelectric layer, which simplifies the manufacturing and makes the structure stable. Furthermore, the cycle time of the process is significantly reduced. However, the control of the thickness of the Bragg reflectors, roughness control, and electrode photolithography are all challenging aspects of SMR manufacturing. In this study, ZnO piezoelectric film, which has a good electromechanical coupling factor and low transmission loss, was used as the c-axis-oriented piezoelectric film. An RF magnetron sputtering system was used to sputter a seed layer to encourage the growth of the zinc-oxide piezoelectric film and improve the c-axis orientation. The pure longitudinal mode and pure shear mode resonance signals were excited using the room temperature positive axis method. The quality factor and electromechanical coupling coefficient of the pure shear mode were 398% and 4.43%, respectively. The quality factor and electromechanical coupling coefficient of the pure longitudinal mode were 171% and 3.83%, respectively. Stability and feature recognition were accomplished in the pure longitudinal mode and the pure shear mode via a simplified and accelerated manufacturing process using electrodes with the same specifications.
机译：共面电极与c轴定向压电膜一起使用，以形成纯纵向模式和纯剪切模式的固体安装谐振器（SMR）。铝和钼用作电极材料，以实现不同的激发纯剪切模式和纯纵向模式。不需要制造底部电极或蚀刻压电层，这简化了制造并且使结构稳定。此外，该过程的周期时间显着减少。但是，布拉格反射器厚度的控制，粗糙度控制和电极光刻是SMR制造中所有具有挑战性的方面。在这项研究中，具有良好的机电耦合因子和低传输损耗的ZnO压电薄膜被用作c轴取向压电薄膜。使用RF磁控溅射系统来溅射种子层，以促进氧化锌压电膜的生长并改善c轴取向。使用室温正轴法激发纯纵向模式和纯剪切模式共振信号。纯剪切模式的品质因数和机电耦合系数分别为398％和4.43％。纯纵向模式的品质因数和机电耦合系数分别为171％和3.83％。通过使用相同规格电极的简化和加速制造过程，可以在纯纵向模式和纯剪切模式下实现稳定性和特征识别。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号