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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Observation of Nonlinear Harmonic Generation of Bulk Modes in SAW Devices
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Observation of Nonlinear Harmonic Generation of Bulk Modes in SAW Devices

机译：声表面波器件中体模的非线性谐波产生的观察

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Nonlinear generation of harmonics is measured on the wafer level on temperature compensated surface-acoustic-wave resonators on lithium niobate. The second-harmonic response features strong peaks looking like multiple resonant modes. The product of the frequency difference between the successive peaks to the substrate thickness is found to remain almost constant. The results also show that the level of the harmonic signal strongly depends on the roughness of the back side of the substrate. Due to these findings, it was assumed that the signal is due to nonlinear generation of a bulk mode. This assumption is confirmed experimentally by measuring the second-harmonic wave field on the back side of the substrate with an interferometer. Possible nonlinear mechanisms explaining these results are discussed.
机译：在铌酸锂上的温度补偿表面声波谐振器上，在晶片级上测量谐波的非线性产生。次谐波响应具有强峰，看起来像多个共振模式。发现连续峰值之间的频率差与基板厚度的乘积几乎保持恒定。结果还表明，谐波信号的电平在很大程度上取决于基板背面的粗糙度。基于这些发现，可以认为该信号是由于体模的非线性产生所致。通过使用干涉仪测量基板背面的二次谐波波场，可以通过实验确认这一假设。讨论了解释这些结果的可能的非线性机制。

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