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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >A Method for Accurate Modeling of BAW Filters at High Power Levels
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A Method for Accurate Modeling of BAW Filters at High Power Levels

机译：高功率水平BAW滤波器的精确建模方法

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摘要

A novel approach for multiphysics modeling of bulk acoustic wave (BAW) filters is presented allowing accurate and at the same time efficient modeling of BAW filters at high power levels. The approach takes the different types of losses and their spatial distribution into account in order to provide the required input for thermal simulation. The temperature distribution determined by thermal simulation is used to modify the geometry and the layer stack of each single resonator of the filter. In this way, the required input for modeling of electromagnetic (EM) and acoustic behavior at high power level is generated. The high accuracy of the modeling approach is verified by the measurements of the S-parameters and the temperature distribution by infrared thermography during high-power loads. Moreover, the influence of the nonlinear behavior on the frequency shift of the resonance frequency is investigated. For this purpose, a parameterized nonlinear Mason model has been combined with a 3-D EM finite-element method and the required nonlinear material parameters were determined by fitting simulation results to the measured polyharmonic distortion model (X-parameters) of a BAW resonator.
机译：提出了一种用于体声波（BAW）滤波器的多物理场建模的新颖方法，可以在高功率水平下对BAW滤波器进行精确而高效的建模。该方法考虑了不同类型的损耗及其空间分布，以便为热仿真提供所需的输入。通过热仿真确定的温度分布用于修改滤波器每个谐振器的几何形状和叠层。以这种方式，生成了在高功率水平下对电磁（EM）和声学行为进行建模所需的输入。在大功率负载下，通过S参数的测量和红外热像仪的温度分布，可以验证建模方法的高精度。此外，研究了非线性行为对谐振频率移频的影响。为此，已将参数化的非线性梅森模型与3-D EM有限元方法相结合，并通过将仿真结果与BAW谐振器的测得的多谐失真模型（X参数）拟合来确定所需的非线性材料参数。

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