SAW tags for the 6-GHz range

Plessky V.P.; Lamothe M.; Davis Z.J.; Suchkov S.G.

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SAW tags for the 6-GHz range

机译：6 GHz范围的SAW标签

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摘要

The possibility of using 6-GHz frequencies for passive SAW tags is discussed. An example of an inline 6-GHz SAW tag design is presented. Supposing that an ultrawide frequency bandwidth B = 775 MHz can be used, the tag dimensions can be significantly reduced and the loss of reflected response remains at an acceptable level of around 50 dB. The devices were manufactured using E-beam lithography and, probed on wafer, show performance close to predicted, including the loss level of approximately 55 dB. The possibility of high-throughput manufacturing by combining nano-imprint and e-beam lithography is discussed.

机译：讨论了将6 GHz频率用于无源SAW标签的可能性。给出了嵌入式6 GHz SAW标签设计的示例。假设可以使用B = 775 MHz的超宽频率带宽，则可以显着减小标签尺寸，并将反射响应的损失保持在50 dB左右的可接受水平。该设备使用电子束光刻技术制造，并在晶圆上进行探测，显示出接近预期的性能，包括大约55 dB的损耗水平。讨论了通过结合纳米压印和电子束光刻技术进行高通量制造的可能性。

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来源
《IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control》 |2014年第12期|2149-2152|共4页
作者
Plessky V.P.; Lamothe M.; Davis Z.J.; Suchkov S.G.;
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作者单位

GVR Trade SA, Gorgier, Switzerland;

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原文格式 PDF
正文语种 eng
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关键词
electron beam lithography; nanolithography; soft lithography; surface acoustic wave devices; bandwidth 775 MHz; e-beam lithography; frequency 6 GHz; high-throughput manufacturing; inline SAW tag design; loss level; nanoimprint lithography; passive tags; tag dimensions; Antennas; Encoding; Frequency control; Frequency measurement; Lithography; Surface acoustic waves;

机译：电子束光刻;纳米光刻;软光刻;声表面波器件;带宽775 MHz;电子束光刻;频率6 GHz;高通量制造;在线SAW标签设计;损耗水平;纳米压印光刻;无源标签;标签尺寸;天线;编码;频率控制;频率测量;光刻;表面声波;

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SAW tags for the 6-GHz range

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