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Rayleigh???bloch waves in CMUT arrays

机译：瑞利CMUT阵列中的斑点波

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摘要

Using the small-signal electrical equivalent circuit of a capacitive micromachined ultrasonic transducer (CMUT) cell, along with the self and mutual radiation impedances of such cells, we present a computationally efficient method to predict the frequency response of a large CMUT element or array. The simulations show spurious resonances, which may degrade the performance of the array. We show that these unwanted resonances are due to dispersive Rayleigh-Bloch waves excited on the CMUT surface-liquid interface. We derive the dispersion relation of these waves for the purpose of predicting the resonance frequencies. The waves form standing waves at frequencies where the reflections from the edges of the element or the array result in a Fabry-Pérot resonator. High-order resonances are eliminated by a small loss in the individual cells, but low-order resonances remain even in the presence of significant loss. These resonances are reduced to tolerable levels when CMUT cells are built from larger and thicker plates at the expense of reduced bandwidth.
机译：使用电容式微机械超声换能器（CMUT）单元的小信号等效电路，以及此类单元的自身和相互辐射阻抗，我们提出了一种计算有效的方法来预测大型CMUT元件或阵列的频率响应。仿真显示寄生谐振，这可能会降低阵列的性能。我们表明，这些不想要的共振是由于在CMUT表面-液体界面上激发的色散Rayleigh-Bloch波引起的。我们推导这些波的色散关系，以预测共振频率。这些波在频率上形成驻波，在该频率下，来自元件或阵列边缘的反射会导致Fabry-Pe′rot谐振器。高阶共振通过单个单元中的小损耗而消除，但是即使存在明显的损耗，低阶谐振也仍然存在。当以更大和更厚的板构建CMUT单元时，以减小带宽为代价，将这些谐振降低到可容忍的水平。

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