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首页> 外文期刊>Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on >Development of a thick film PZT foil sensor for use in structural health monitoring applications
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Development of a thick film PZT foil sensor for use in structural health monitoring applications

机译：开发用于结构健康监测应用的厚膜PZT箔传感器

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摘要

Acoustic emission (AE) monitoring is a technique of growing interest in the field of nondestructive testing (NDT). The use of AE devices to monitor the health of structural components is currently limited by the cost of AE equipment, which prohibits the permanent placement of AE devices on structures for the purposes of continuous monitoring and the monitoring of areas with limited access. Micro electromechanical systems (MEMS) can provide solutions to these problems. We present the manufacture of a 4.4-;C;m-thick lead zirconate titanate (PZT) film on a 110-;C;m-thick titanium foil substrate for use as an AE sensor. The thick-film sensor is benchmarked against commercially available AE sensors in static and dynamic monitoring applications. The thick-film AE device is found to perform well in the detection of AE in static applications. A low signal-to-noise ratio is found to prohibit the detection of AE in a dynamic application.
机译：声发射（AE）监视是一种在无损检测（NDT）领域中日益受到关注的技术。 AE设备的成本目前限制了使用AE设备来监视结构部件的健康状况，这限制了AE设备在建筑物上的永久放置，以进行连续监控和对出入受限区域的监控。微机电系统（MEMS）可以为这些问题提供解决方案。我们介绍了在110-; C; m厚的钛箔基材上制造4.4-; C; m厚的钛酸锆钛酸铅（PZT）膜的过程，用作AE传感器。厚膜传感器在静态和动态监控应用中均以市售的AE传感器为基准。发现厚膜AE设备在静态应用中的AE检测中表现良好。发现低信噪比会禁止在动态应用中检测AE。

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