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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Acoustic resonator based on periodically poled lithium niobate ridge
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Acoustic resonator based on periodically poled lithium niobate ridge

机译：基于周期性极化铌酸锂脊的声谐振器

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摘要

The constant improvement of industrial needs to face modern telecommunication challenges leads to the development of novel transducer principles as alternatives to SAW and BAW solutions. The main technological limits of SAW (short-circuit between electrodes) and BAW (precise thickness control) solutions can be overcome by a new kind of transducer based on periodically poled ferroelectric substrate. The approach proposed in this paper exploits a ridge structure combined with a periodically poled transducer (PPT), allowing for the excitation of highly coupled modes unlike previously published results on planar PPTs. High-aspect-ratio ridges showing micrometer dimensions are achieved by dicing PPT plates with a diamond-tipped saw. An adapted metallization is achieved to excite acoustic modes exhibiting electromechanical coupling in excess of 15% with phase velocities up to 10 000 m·s-1. Theoretical predictions show that these figures may reach values up to 20% and 18 000 m·s-1, respectively, using an appropriate design.
机译：面对现代电信挑战的工业需求的不断提高，导致了新型换能器原理的发展，可以替代SAW和BAW解决方案。 SAW（电极之间的短路）和BAW（精确的厚度控制）解决方案的主要技术限制可以通过一种基于周期性极化铁电体的新型传感器来克服。本文提出的方法利用了与周期性极化换能器（PPT）相结合的脊结构，从而可以激发高度耦合模式，这与先前在平面PPT上发表的结果不同。通过使用菱形锯将PPT板切成小块，可以显示出具有微米尺寸的高纵横比脊。实现了适当的金属化，以激发表现出超过15％的机电耦合且声速高达10000 m·s-1的声模。理论预测表明，使用适当的设计，这些数字可能分别达到20％和18 000 m·s-1的值。

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    Fabien Henrot; Florent Bassignot; Blandine Guichardaz; Gwenn Ulliac; Emilie Courjon; Jean-Yves Rauch; Thomas Baron; Sylvain Ballandras;

  • 作者单位

    Franche-Comté Electronique, Mécanique, Thermique et Optique-Sciences et Technologies (FEMTO-ST) Institute, France;

    Franche-Comté Electronique, Mécanique, Thermique et Optique-Sciences et Technologies (FEMTO-ST) Institute, France;

    Franche-Comté Electronique, Mécanique, Thermique et Optique-Sciences et Technologies (FEMTO-ST) Institute, France;

    Franche-Comté Electronique, Mécanique, Thermique et Optique-Sciences et Technologies (FEMTO-ST) Institute, France;

    Franche-Comté Electronique, Mécanique, Thermique et Optique-Sciences et Technologies (FEMTO-ST) Institute, France;

    Franche-Comté Electronique, Mécanique, Thermique et Optique-Sciences et Technologies (FEMTO-ST) Institute, France;

    Franche-Comté Electronique, Mécanique, Thermique et Optique-Sciences et Technologies (FEMTO-ST) Institute, France;

    Franche-Comté Electronique, Mécanique, Thermique et Optique-Sciences et Technologies (FEMTO-ST) Institute, France;

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  • 正文语种 eng
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  • 关键词

    Transducers; Couplings; Electrodes; Acoustics; Lithium niobate; Radio frequency; Materials;

    机译：传感器;联轴器;电极;声学;铌酸锂;射频;材料;

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