Iridium interdigital transducers for high-temperature surface acoustic wave applications

Aubert T.; Bardong J.; Elmazria O.; Bruckner G.; Assouar B.

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Iridium interdigital transducers for high-temperature surface acoustic wave applications

机译：高温表面声波应用的铱叉指换能器

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Iridium is investigated as a potential metal for interdigital transducers (IDTs) in SAW devices operating at high temperatures. SAW delay lines based on such IDTs and langasite (LGS) substrate are fabricated and electrically characterized. The results show reliable frequency responses up to 1000°C. The strong increase of insertion losses beyond this temperature, leading to the vanishing of the signal between 1140 and 1200°C, is attributed to surface transformation of the LGS crystal, consisting of relevant gallium and oxygen losses, as evidenced by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and secondary ion mass spectroscopy.

机译：铱被研究为在高温下工作的SAW设备中的叉指式换能器（IDT）的潜在金属。基于这种IDT和硅酸铝（LGS）基板的SAW延迟线被制造并进行了电气表征。结果显示了高达1000°C的可靠频率响应。超过此温度，插入损耗的强烈增加导致信号在1140至1200°C之间消失，这归因于LGS晶体的表面转变，包括相关的镓和氧损失，如扫描电子显微镜，能量所证明的那样。 -分散X射线光谱法和二次离子质谱法。

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《Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on》 |2012年第2期|p.194-197|共4页
作者
Aubert T.; Bardong J.; Elmazria O.; Bruckner G.; Assouar B.;
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Carinthian Tech Res., St. Magdalen, Austria;

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1. High-Coupling and High-Temperature Stable Surface Acoustic Wave Substrates Using Groove-Type Interdigital Transducer [J] . Yusuke Satoh, Daisuke Kawasaki, Kazuhiko Yamanouchi Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2006,第5B期

机译：使用凹槽型叉指式换能器的高耦合和高温稳定表面声波基片
2. Growth of ZnO thin films on interdigital transducer Corning 7059 glass substrates by two-step fabrication methods for surface acoustic wave applications [J] . Wu MS., Tsai WH., Shih WC. Journal of Physics, D. Applied Physics: A Europhysics Journal . 1998,第8期

机译：通过两步制造方法在表面声波应用中在叉指式康宁7059玻璃基板上生长ZnO薄膜
3. Application of slanted finger interdigital transducer surface acoustic wave devices to ultraviolet array photodetectors [J] . Chein-Ching Ma, Tsai-Ju Huang, Jhih-Ming Yu Journal of Applied Physics . 2008,第3期

机译：倾斜手指叉指式换能器表面声波装置在紫外阵列光电探测器中的应用
4. Finite element simulation of surface acoustic waves excited in barium-strontium titanate films fabricated on magnesium oxide substrate by interdigital transducers [C] . Timoshenko P.E., Kalinchuk V.V., Shirokov V.B., International conference on actual problems of electron devices engineering . 2014

机译：叉指换能器在氧化镁基底上钛酸钡锶钛薄膜中激发的表面声波的有限元模拟
5. A perturbative analysis of surface acoustic wave propagation and reflection in interdigital transducers. [D] . Thoma, Carsten Hilmar. 1997

机译：指状换能器中表面声波传播和反射的扰动分析。
6. Surface Acoustic Wave Gyroscopic Effect in an Interdigital Transducer [O] . Xueping Sun, Weiguo Liu, Xiuting Shao, 2019

机译：叉指式换能器中的表面声波陀螺效应
7. Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer [O] . Laude, Vincent, Gérard, Davy, Khelfaoui, Naima, 2008

机译：环形叉指换能器产生的表面声波的亚波长聚焦
8. Experimental Research on Fabrication of Interdigital Transducers for Acoustic Surface Waves. [R] . malmberg, p. r. o'keefe, t. w. 1975

机译：声表面波叉指式传感器制作的实验研究。

Iridium interdigital transducers for high-temperature surface acoustic wave applications

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