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In situ observation and measurement of the SAW thin-film acoustoelectric effect

机译：SAW薄膜声电效应的原位观察与测量

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摘要

The thin-film acoustoelectric effect in SAW devices describes the interaction of electrical energy between a SAW in a piezoelectric medium and a thin film in the wave's propagation path. The real-time observation of the thin-film acoustoelectric interaction is useful in the design and characterization of SAW sensors (i.e., temperature, humidity, viscosity, voltage, current, Hall effects, etc.). An in situ test fixture was designed to be mechanically, thermally, and electrically stable. Data acquisition software and an electron beam evaporation system were configured for real-time thin-film characterization during film growth. Data have been observed for more than 20 SAW devices and over a wide range of frequencies (i.e., 62 MHz to 1 GHz). The results suggest that the use of the in situ procedure yielded good agreement between theoretical predictions and the measured data, which demonstrates a method for the characterization of a SAW H2-gas sensor in real-time.
机译：SAW器件中的薄膜声电效应描述了压电介质中的SAW与波的传播路径中的薄膜之间的电能相互作用。薄膜声电相互作用的实时观察对于SAW传感器的设计和表征（即温度，湿度，粘度，电压，电流，霍尔效应等）很有用。原位测试夹具设计为机械，热和电稳定。配置了数据采集软件和电子束蒸发系统，以在膜生长期间进行实时薄膜表征。已经观察到20多个SAW器件的数据，并在很宽的频率范围内（即62 MHz至1 GHz）观察到数据。结果表明，现场程序的使用在理论预测和实测数据之间取得了很好的一致性，这说明了一种用于SAW H 2 气体传感器的实时表征的方法。

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