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首页> 外文期刊>Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on >A laser probe based on a sagnac interferometer with fast mechanical scan for RF surface and bulk acoustic wave devices
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A laser probe based on a sagnac interferometer with fast mechanical scan for RF surface and bulk acoustic wave devices

机译：基于sagnac干涉仪的激光探头，具有对RF表面和体声波设备的快速机械扫描

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摘要

This paper describes the development of a phasesensitive laser probe with fast mechanical scan for RF surface and bulk acoustic wave (SAW/BAW) devices. The Sagnac interferometer composed of micro-optic elements was introduced for the selective detection of RF vertical motion associated with RF SAW/BAW propagation and vibration. A high-pass characteristic of the interferometer makes the measurement very insensitive to low-frequency vibration. This feature allows us to apply the fast mechanical scan to the interferometric measurement without badly sacrificing its SNR and spatial resolution. The system was applied to the visualization of a field pattern on the vibrating surface of an RF BAW resonator operating in the 2 GHz range. The field pattern was obtained in 17 min as a 2-D image (500 × 750 pixel with 0.4 ¿ m resolution and SNR of 40 dB). The system was also applied to the characterization of an RF SAW resonator operating in the 1 GHz range, and the applicability of the system was demonstrated.
机译：本文介绍了具有快速机械扫描功能的相敏激光探头的开发，该探头用于RF表面和体声波（SAW / BAW）设备。引入了由微光学元件组成的Sagnac干涉仪，用于选择性检测与RF SAW / BAW传播和振动相关的RF垂直运动。干涉仪的高通特性使测量对低频振动非常不敏感。此功能使我们能够将快速机械扫描应用于干涉测量，而不会牺牲其SNR和空间分辨率。该系统应用于在2 GHz范围内工作的RF BAW谐振器的振动表面上的场模式的可视化。场模式是在17分钟内获得的二维图像（500×750像素，分辨率为0.4μm，SNR为40 dB）。该系统还用于表征工作在1 GHz范围内的RF SAW谐振器，并证明了该系统的适用性。

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