• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Polymer coating behavior of Rayleigh-SAW resonators with gold electrode structure for gas sensor applications
【24h】

Polymer coating behavior of Rayleigh-SAW resonators with gold electrode structure for gas sensor applications

机译：带有金电极结构的瑞利声表面波谐振器的聚合物涂层性能，用于气体传感器

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Results from systematic polymer coating experiments on surface acoustic wave (SAW) resonators and coupled resonator filters (CRF) on ST-cut quartz with a corrosion-proof electrode structure entirely made of gold (Au) are presented and compared with data from similar SAW devices using aluminium (Al) electrodes. The recently developed Au devices are intended to replace their earlier Al counterparts in sensor systems operating in highly reactive chemical gas environments. Solid parylene C and soft poly[chlorotrifluoroethylene-co-vinylidene fluoride] (PCFV) polymer films are deposited under identical conditions onto the surface of Al and Au devices. The electrical performance of the Parylene C coated devices is monitored online during film deposition. The PCVF coated devices are evaluated after film deposition. The experimental data show that the Au devices can stand up to 40% thicker solid films for the same amount of loss increase than the Al devices and retain better resonance and phase characteristics. The frequency sensitivities of Au and Al devices to parylene C deposition are nearly identical. After coating with soft PCFV sensing film, the Au devices provide up to two times higher gas sensitivity when probed with cooling agent, octane, or tetrachloroethylene
机译：提出了在表面声波（SAW）谐振器和ST切割石英上具有完全由金（Au）制成的耐腐蚀电极结构的耦合谐振器滤波器（CRF）上进行的系统聚合物涂层实验的结果，并将其与类似SAW器件的数据进行了比较使用铝（Al）电极。最近开发的Au器件旨在替代在高反应性化学气体环境中运行的传感器系统中的早期Al同类器件。固态聚对二甲苯C和柔软的聚[三氟氯乙烯-偏二氟乙烯共聚物]（PCFV）聚合物薄膜在相同条件下沉积在Al和Au器件的表面上。在薄膜沉积过程中，可以在线监测Parylene C涂层设备的电性能。涂膜后评估PCVF涂层的器件。实验数据表明，与Al器件相比，Au器件可承受多达40％的固体膜厚，而损耗量却与Al器件相同，并且保留了更好的谐振和相态特性。 Au和Al器件对聚对二甲苯C沉积的频率敏感性几乎相同。在涂上柔软的PCFV传感膜后，当用冷却剂，辛烷或四氯乙烯探测时，Au器件对气体的敏感度提高了两倍

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号