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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Polyurea Thin Film Ultrasonic Transducers for Nondestructive Testing and Medical Imaging
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Polyurea Thin Film Ultrasonic Transducers for Nondestructive Testing and Medical Imaging

机译：聚脲薄膜超声换能器，用于无损检测和医学成像

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摘要

Ultrasonic transducers using polyurea piezoelectric thin film are studied in this paper. Aromatic polyurea thin films, prepared by vapor deposition polymerization, have useful characteristics for use as an ultrasonic transducer. This paper presents the fabrication and experimental evaluation of ultrasonic transducers formed using polyurea films. First, the vapor deposition polymerization process using two monomers is briefly reviewed, and the temperature conditions for higher piezoelectric constants are explored. Second, in order to test the fundamental characteristics of this material as a high-frequency, ultrasonic transducer, a polyurea film of 2.5 mum thickness was deposited on a silicon substrate. In the pulse/echo experiment results, a resonant frequency of about 100 MHz was observed. Third, we fabricated a concave point focus transducer and a cylindrical line focus transducer. To examine the performances of the focus transducers, two-dimensional images of a coin and V(z) curve measurements for an aluminum surface were demonstrated.
机译：本文研究了采用聚脲压电薄膜的超声换能器。通过气相沉积聚合制备的芳族聚脲薄膜具有用作超声换能器的有用特性。本文介绍了使用聚脲薄膜形成的超声换能器的制备和实验评估。首先，简要回顾了使用两种单体的气相沉积聚合工艺，并探讨了较高压电常数的温度条件。其次，为了测试这种材料作为高频超声换能器的基本特性，在硅基板上沉积了厚度为2.5μm的聚脲膜。在脉冲/回波实验结果中，观察到大约100 MHz的谐振频率。第三，我们制造了凹点聚焦换能器和圆柱线聚焦换能器。为了检查聚焦传感器的性能，演示了铝表面硬币的二维图像和V（z）曲线测量结果。

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