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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Reducing inter-element acoustic crosstalk in capacitive micromachined ultrasound transducers
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Reducing inter-element acoustic crosstalk in capacitive micromachined ultrasound transducers

机译：减少电容式微加工超声换能器中的元素间声串扰

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摘要

The inter-element acoustic crosstalk problem in capacitive micromachined ultrasound transducer (CMUT) arrays is discussed in this paper. A transfer function matrix approach was used to derive modified transmit waveforms on adjacent elements to reduce the apparent acoustic crosstalk. The significance of this is that this technique relies on programmable waveforms, so that it yields a reduced crosstalk effect with no additional fabrication complexity if the requisite programmable waveform transmit circuits are available. The crosstalk reduction achieved by this method also was examined in combination with conventional (physical separation-based) crosstalk reduction approaches. A CMUT transducer array structure was simulated in a two-dimensional (2-D) model using finite element analysis (FEA), and the crosstalk reduction method was tested for both small and large alternating current (AC) (ultrasonic) excitation conditions. A 25 dB crosstalk reduction was achieved for small AC excitation conditions in which approximately linear operation is encountered. When the AC excitation amplitude was large compared to the direct current (DC) bias, an "iterative harmonic cancellation" approach (also based on programmable waveform techniques) could be applied in combination with the crosstalk reduction method to minimize the inherently transmitted harmonics, and a similar crosstalk reduction effect of 25.5 dB was achieved. This method also can be combined with other structure-modification based crosstalk reduction approaches
机译：本文讨论了电容微机械超声换能器（CMUT）阵列中的元素间声学串扰问题。传递函数矩阵方法用于导出相邻元素上的修改后的发射波形，以减少表观的声串扰。这样做的意义在于，该技术依赖于可编程波形，因此，如果可以使用必要的可编程波形发射电路，则可以在不增加制造复杂性的情况下降低串扰效应。还结合常规的（基于物理分离的）串扰减少方法来检查通过此方法实现的串扰减少。使用有限元分析（FEA）在二维（2-D）模型中对CMUT换能器阵列结构进行了仿真，并针对小型和大型交流（AC）（超声）激励条件测试了串扰降低方法。在遇到近似线性工作的小型AC激励条件下，串扰降低了25 dB。当交流励磁幅度大于直流偏置时，可以将“迭代谐波消除”方法（也基于可编程波形技术）与串扰降低方法结合使用，以最小化固有传输的谐波，并且达到了25.5 dB的类似串扰降低效果。该方法还可以与其他基于结构修改的串扰减少方法结合使用

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