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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >FEM/BEM impedance and power analysis measured LGS SH-SAW devices
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FEM/BEM impedance and power analysis measured LGS SH-SAW devices

机译：FEM / BEM阻抗和功率分析测得的LGS SH-SAW器件

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摘要

Pure shear horizontal piezoelectrically active surface and bulk acoustic waves (SH-SAW and SH-BAW) exist along rotated Y-cuts, Euler angles (0/spl deg/, /spl theta/, 90/spl deg/), of trigonal class 32 group crystals, which include the LGX family of crystals (langasite, langatate, and langanite). In this paper both SH-SAW and SH-BAW generated by finite-length, interdigital transducers (IDTs) on langasite, Euler angles (0/spl deg/, 22/spl deg/, 90/spl deg/), are simulated using combined finite- and boundary-element methods (FEM/BEM). Aluminum and gold IDT electrodes ranging in thickness from 600 /spl Aring/ to 2000 /spl Aring/ have been simulated, fabricated, and tested, with both free and metalized surfaces outside the IDT regions considered. Around the device's operating frequency, the percent difference between the calculated IDT impedance magnitude using the FEM/BEM model and the measurements is better than 5% for the different metal layers arid thicknesses considered. The proportioning of SH-SAW and SH-BAW power is analyzed as a function of the number of IDT electrodes; type of electrode metal; and relative thickness of the electrode film, h//spl lambda/, where /spl lambda/ is the SH-SAW wavelength. Simulation results show that moderate mechanical loading by gold electrodes increases the proportion of input power converted to SH-SAW. For example, with a split-electrode IDT, comprising 238 electrodes with a relative thickness h//spl lambda/ = 0.63% and surrounded by an infinitesimally thin conducting film, nearly 9% more input power is radiated as SH-SAW when gold instead of aluminum electrodes are used.
机译：纯剪切水平压电活性表面和体声波（SH-SAW和SH-BAW）沿旋转的Y形切线存在，欧拉角（0 / spl deg /，/ spl theta /，90 / spl deg /）为三角类32组晶体，其中包括LGX族晶体（蓝铁矿，蓝铁矿和锰铁矿）。在本文中，使用langasite，欧拉角（0 / spl deg /，22 / spl deg /，90 / spl deg /）的有限长度叉指换能器（IDT）生成的SH-SAW和SH-BAW进行了模拟组合有限元和边界元方法（FEM / BEM）。铝和金IDT电极的厚度范围从600 / spl Aring /至2000 / spl Aring /，已经过模拟，制造和测试，并考虑了IDT区域以外的自由表面和金属化表面。在器件的工作频率附近，对于不同的金属层和考虑的厚度，使用FEM / BEM模型计算得出的IDT阻抗幅度与测量值之间的百分比差异要好于5％。根据IDT电极的数量分析SH-SAW和SH-BAW功率的比例。电极金属的类型；电极膜的相对厚度h // spl lambda /，其中/ spl lambda /是SH-SAW波长。仿真结果表明，金电极施加的适度机械负载会增加输入功率转换为SH-SAW的比例。例如，采用分电极IDT（包括238个电极，相对电极的厚度为h // spl lambda / = 0.63％，并被无限薄的导电膜包围），当金代替金时，SH-SAW的输入功率将增加近9％使用了一半的铝电极。

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