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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >CMUTS with dual electrode structure for improved transmit and receive performance
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CMUTS with dual electrode structure for improved transmit and receive performance

机译：具有双电极结构的CMUTS可改善发射和接收性能

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摘要

In this paper, we introduce capacitive micro-machined ultrasonic transducers (CMUTs) with electrically isolated multiple electrodes embedded in the same silicon nitride CMUT membrane. Some of the advantages of this structure are demonstrated using a dual-electrode CMUT with separate transmit and receive electrodes as an example. By locating the transmit electrodes near the edges of a rectangular CMUT membrane, the stable displacement range, hence the maximum pressure amplitude during transmit mode is increased without collapsing the membrane when operated within static collapse voltage range. In the receive mode, the center receive electrode is brought closer to the substrate by biasing the side electrodes, and a higher electromechanical transformer ratio is obtained at low direct current (DC) bias. Therefore, dual-electrode CMUT has an effectively larger gap as compared to conventional CMUT during transmit, and it has an effectively smaller gap during receive. Demonstrative experiments are performed on dual-electrode CMUTs with rectangular membranes with different side and center electrode sizes for transmit and receive measurements. By using the two 4-/spl mu/m wide side electrodes and an 8-/spl mu/m wide center electrode on a 20-/spl mu/m wide membrane, a 6.8 dB increase in maximum output pressure is obtained with side electrode excitation as compared to conventional center electrode. Similarly, the receive performance improvement was demonstrated while reducing the DC bias requirements. Simple finite-element and equivalent circuit-based models were developed to successfully model the behavior of dual-electrode CMUTs. Simulations show that, with simple modifications, more than 10 dB overall sensitivity improvement is feasible with dual-electrode CMUTs with rectangular membranes.
机译：在本文中，我们介绍了电容微机械超声换能器（CMUT），其电绝缘的多个电极嵌入在同一氮化硅CMUT膜中。以带有独立发射电极和接收电极的双电极CMUT为例，演示了该结构的一些优势。通过将发射电极放置在矩形CMUT膜的边缘附近，可以稳定位移范围，因此在静态崩溃电压范围内工作时，在发射模式期间最大压力幅值会增加而不会使膜塌陷。在接收模式下，通过使侧电极偏置，使中心接收电极靠近基板，并且在低直流（DC）偏置下可获得较高的机电变压器比。因此，与传统的CMUT相比，双电极CMUT在发送期间具有有效更大的间隙，并且在接收期间其具有有效较小的间隙。在带有矩形膜的双电极CMUT上进行了演示性实验，该矩形膜具有不同的侧面和中央电极尺寸，用于发送和接收测量。通过在宽度为20 / splμ/ m的膜上使用两个宽度为4- / splμ/μm的侧电极和一个宽度为8- / splμ/ m的中心电极，侧面的最大输出压力提高了6.8 dB。电极激励与常规中心电极相比。同样，在降低直流偏置要求的同时，还证明了接收性能的提高。开发了简单的基于有限元和等效电路的模型，以成功地对双电极CMUT的行为进行建模。仿真表明，通过简单的修改，带有矩形膜的双电极CMUT可以将整体灵敏度提高10 dB以上。

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