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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Proton-exchanged 36/spl deg/ Y-X LiTaO/sub 3/ waveguides for surface acoustic wave
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Proton-exchanged 36/spl deg/ Y-X LiTaO/sub 3/ waveguides for surface acoustic wave

机译：质子交换的36 / spl度/ Y-X LiTaO / sub 3 /波导用于声表面波

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摘要

A nontoxic proton source, octanoic acid, was adopted to fabricate proton-exchanged (PE) waveguides in 36/spl deg/ Y-X lithium tantalate (LiTaO/sub 3/) substrates. The PE ability of octanoic acid on LiTaO/sub 3/, the penetration depth, was investigated by secondary-ion mass spectrometry (SIMS). The penetration depth of hydrogen ion exhibited an obviously step-like profile, which will be excellent for waveguide application. The relationship between waveguide depth (d) and exchanging time (t) was represented by d = 0.0653 /spl times/ /spl radic/t at T = 200/spl deg/C. To deserve to be mentioned, the octanoic acid has a slight dissociation coefficient and low activation energy, thus the accurate waveguide depth control can be obtained. For the application of acoustic wave guided acousto-optic devices, the leaky surface acoustic wave (LSAW) properties of PE 36/spl deg/ Y-X LiTaO/sub 3/ waveguides were investigated. The phase velocity slightly decreased with the increase of kd, where k was wavenumber. An indispensable parameter of acoustic wave device, the temperature coefficient of frequency (TCF), calculated from the frequency change of the output of LSAW delay line showed an increase with increased kd.
机译：采用无毒的质子源辛酸在36 / spl deg / Y-X钽酸锂（LiTaO / sub 3 /）基板上制造质子交换（PE）波导。通过二次离子质谱（SIMS）研究了辛酸在LiTaO / sub 3 /上的PE渗透深度。氢离子的穿透深度表现出明显的阶梯状轮廓，这对于波导应用将是极好的。波导深度（d）和交换时间（t）之间的关系由d = 0.0653 / spl次/ / splidic / t在T = 200 / spl deg / C时表示。值得一提的是，辛酸的解离系数小，活化能低，因此可以精确控制波导深度。为了应用声波引导声光器件，研究了PE 36 / spl deg / Y-X LiTaO / sub 3 /波导的泄漏表面声波（LSAW）特性。相速度随kd的增加而略有下降，其中k为波数。根据LSAW延迟线输出的频率变化计算出的声波装置不可或缺的参数频率温度系数（TCF）随着kd的增加而增加。

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