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Effect of transverse force on the performance of quartz resonator force sensors

机译:横向力对石英谐振器力传感器性能的影响

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摘要

This paper discusses the effect of transverse force on the performance of quartz crystal resonator (QXR) force sensors that use symmetrical incomplete circular QXRs as sensing elements. Based on Lee's vibration theory and the transverse force-induced stress distribution, frequency changes are derived. This result and finite element method (FEM) are applied to investigate the performance of two metal-quartz combined sensors under the action of transverse force. Analytical and experimental results show that transverse force affects the sensitivity and linearity of QXR force sensors.
机译:本文讨论了横向力对使用对称不完整圆形QXR作为传感元件的石英晶体谐振器(QXR)力传感器性能的影响。根据李氏振动理论和横向力引起的应力分布,得出频率变化。该结果和有限元方法(FEM)用于研究两个金属-石英组合传感器在横向力作用下的性能。分析和实验结果表明,横向力会影响QXR力传感器的灵敏度和线性度。

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