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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Calculation and experimental verification of the acoustic stress at GHz frequencies in SAW resonators
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Calculation and experimental verification of the acoustic stress at GHz frequencies in SAW resonators

机译：SAW谐振器中GHz频率处的声应力的计算和实验验证

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摘要

High power applications of surface acoustic wave (SAW) devices may lead to acoustomigration in their thin metal electrodes, which deteriorates the performance or may even destroy the SAW device. It is confirmed in this paper that the mechanism of acoustomigration is caused by the SAW-induced stress in the metal. The quantitative calculation of this stress are shown in detail, starting from the widely used P-Matrix model as a standard analysis tool. The combination with the partial wave method (PWM) yields the stress distribution inside the metal. This approach provides the flexibility to determine the stresses for any given point in a SAW device, for any input power, frequency, wavetype, device geometry, or metal layer. In order to confirm the absolute values of the stress components, we calculated and measured displacements as a function of input power and frequency.
机译：表面声波（SAW）设备的高功率应用可能会导致其薄金属电极发生声迁移，从而降低性能甚至破坏SAW设备。本文证实了声迁移的机理是由SAW诱导的金属应力引起的。从广泛使用的P-Matrix模型作为标准分析工具开始，详细显示了这种应力的定量计算。与分波方法（PWM）结合使用可产生金属内部的应力分布。这种方法为确定SAW器件中任何给定点，任何输入功率，频率，波形，器件几何形状或金属层的应力提供了灵活性。为了确定应力分量的绝对值，我们计算并测量了位移与输入功率和频率的关系。

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