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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Resonant spectrum method to characterize piezoelectric films in composite resonators
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Resonant spectrum method to characterize piezoelectric films in composite resonators

机译：共振光谱法表征复合谐振器中的压电薄膜

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摘要

In this paper, we present a direct method to characterize a piezoelectric film that is sandwiched with two electrodes and deposited on a substrate to form a four-layer thickness extension mode composite resonator (also known as over-moded resonator). Based on the parallel and series resonant frequency spectra of a composite resonator, the electromechanical coupling factor, the density and the elastic constant of the piezoelectric film can be evaluated directly. Experimental results on samples consisting of ZnO films on fused quartz substrates with different thickness are presented. They show good agreement with theoretical prediction. The mechanical effect of the electrode on the method is investigated, and numerical simulation shows that the effect of the electrodes can be properly corrected by the modified formulae presented in this paper. The effect of mechanical loss in piezoelectric film and in substrate on this method also has been investigated. It is proven that the method is insensitive to the losses.
机译：在本文中，我们提出了一种表征压电膜的直接方法，该压电膜夹在两个电极之间并沉积在基板上，以形成四层厚度扩展模式复合谐振器（也称为过调制谐振器）。基于复合谐振器的并联和串联谐振频谱，可以直接评估压电薄膜的机电耦合系数，密度和弹性常数。给出了在不同厚度的熔融石英衬底上由ZnO膜组成的样品的实验结果。它们与理论预测显示出良好的一致性。研究了电极对方法的机械作用，数值模拟表明，本文提出的改进公式可以适当地校正电极的作用。还研究了压电薄膜和基板中的机械损耗对该方法的影响。事实证明，该方法对损耗不敏感。

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