• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Nanometer stepping drives of surface acoustic wave motor
【24h】

Nanometer stepping drives of surface acoustic wave motor

机译：声表面波电动机的纳米步进驱动器

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

High resolution (from nanometer to subnanometer) stepping drives of a surface acoustic wave motor are presented. It was shown that step displacement was easily controlled by adjusting a number of driving waves, using a steel ball slider equipped with permanent magnet for preload. By means of this open loop control, the step displacement was controlled from centimeter-order to submicrometer-order. In this paper, using a silicon slider equipped with a ball bearing linear guide, the stepping motions of a surface acoustic wave motor were investigated. A laser interferometer equipped with a 2-picometer resolution displacement demodulator was introduced. Motions of the slider ranging from several hundreds of nanometers to several nanometers in each step displacement were observed. Reduction of the driving waves down to 25 cycles, under a 100 Vpeak driving voltage and a 30 N preload condition, generated about 2 nm stepping motion using our experimental setup under an open loop condition. We also demonstrated subnanometer step movements. These experimental results indicated that the surface acoustic wave motor has an ability of subnanometer positioning with a centimeter-level stroke.
机译：提出了表面声波电机的高分辨率（从纳米到亚纳米）步进驱动器。结果表明，使用配备有用于预紧的永磁体的钢球滑块，可以通过调节驱动波的数量来轻松控制步进位移。通过这种开环控制，可以将步进位移从厘米级控制到亚微米级。在本文中，使用装有滚珠直线导轨的硅滑块，研究了表面声波电机的步进运动。介绍了配备2像素分辨率位移解调器的激光干涉仪。在每一步位移中观察到滑块的运动范围从几百纳米到几纳米。在开环条件下使用我们的实验装置，在100 Vpeak的驱动电压和30 N的预负载条件下，将驱动波降低至25个周期，可产生约2 nm的步进运动。我们还演示了亚纳米级的步进运动。这些实验结果表明，表面声波电动机具有以厘米级行程进行亚纳米定位的能力。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号