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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Standardized evaluation of chemical compositions of LiTaO3 single crystals for SAW devices using the LFB ultrasonic material characterization system
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Standardized evaluation of chemical compositions of LiTaO3 single crystals for SAW devices using the LFB ultrasonic material characterization system

机译：使用LFB超声材料表征系统对SAW器件LiTaO3单晶的化学成分进行标准化评估

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摘要

The line-focus-beam ultrasonic material characterization (LIFB-UMC) system is applied to compare and evaluate tolerances provided independently for the Curie temperature TC and lattice constant Α to evaluate commercial LiTaO3 single crystals by measuring the Rayleigh-type leaky surface acoustic wave (LSAW) velocities VLSAW. The relationships between VLSAW, and TC and Α measured by individual manufacturers were obtained experimentally using 42°YX-LiTaO3 wafers as specimens from three crystal manufacturers. In addition, the relationship between VLSAW and SH-type SAW velocities VSAW that are actually used for the SAW device wafers was obtained through calculations, using the chemical composition dependences of the acoustical physical constants for LiTaO3 crystals reported previously. The result of a comparison between the TC tolerance of ±3°C and the Α tolerance of ±0.00002 nm through the common scale of VLSAW or VSAW demonstrated that the Α tolerance is 1.6 times larger than the TC tolerance. Furthermore, we performed a standardized comparison of statistical data of TC and Α for LiTaO3 crystals grown by two manufacturers during 1999 and 2000, using VLSAW. The results clarified the differences of the average chemical compositions and of the chemical composition distributions among the crystal ingots between the two manufacturers. A guideline for the standardized evaluation procedure has been established for the SAW-device wafer specifications by the LFB-UMC system.
机译：线聚焦束超声材料表征（LIFB-UMC）系统用于比较和评估为居里温度TC和晶格常数A独立提供的公差，以通过测量瑞利型泄漏表面声波来评估商用LiTaO3单晶（ LSAW）速度VLSAW。使用42°YX-LiTaO3晶片作为样品从三个晶体制造商处以实验方式获得了各个制造商测得的VLSAW与TC和Α之间的关系。另外，通过使用先前报道的LiTaO 3晶体的声学物理常数的化学组成依赖性，通过计算获得了用于SAW器件晶片的VLSAW和SH型SAW速度VSAW之间的关系。通过VLSAW或VSAW的通用标度比较了±3°C的TC公差和±0.00002 nm的A公差，结果表明Α公差是TC公差的1.6倍。此外，我们使用VLSAW对两个制造商在1999年和2000年间生长的LiTaO3晶体的TC和Α的统计数据进行了标准化比较。结果澄清了两个制造商之间的平均化学组成和晶体锭之间的化学组成分布的差异。 LFB-UMC系统已针对SAW器件晶圆规格建立了标准化评估程序的指南。

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