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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >SSBW to PSAW conversion in SAW devices using heavy mechanicalloading
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SSBW to PSAW conversion in SAW devices using heavy mechanicalloading

机译：使用重型机械负载将SAW器件中的SSBW转换为PSAW

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摘要

The development of efficient computation tools based on mixednanalytical and numerical calculation approaches allows precisendescriptions and characterizations of surface acoustic waves (SAW)npropagation, taking into account realistic electrical and mechanicalnboundary conditions. As an example, suppression of the leaky SAW, alsoncalled pseudo SAW (PSAW), attenuation has been predicted using suchntools allowing to explain experimental occurrences for SAW devices on YXncut lithium niobate and lithium tantalate with thick aluminum stripngratings (6% < h/Λ < 10%). In this work, such a theoreticalnmodel is used to analyze the evolution of surface waves on standard YXnlithium tantalate cuts versus aluminum strip height. It is shown thatnthe surface skimming bulk wave (SSBW), which accompanies the pseudo SAWnon such crystal orientations, may be trapped by the grating, exhibitingnthen a second pseudo SAW behavior when close to the Bragg condition. Andevice has been designed and fabricated to check these theoreticalnpredictions. The experimental evidence of the existence of thenphenomenon allows one to discuss its consequences on more classicalndevices built on (Y + 36°, X) LiTaO3 substrates
机译：基于混合分析和数值计算方法的高效计算工具的开发，可以考虑实际的电气和机械边界条件，对声表面波（SAW）传播进行精确的描述和表征。例如，通过使用这样的工具可以预测对泄漏声表面波（也称为伪声表面波（PSAW））的抑制，从而可以解释YXncut铌酸锂和钽酸锂上的SAW器件的实验现象，并具有较厚的铝剥离（6％

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