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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Piezoelectrically actuated flextensional micromachined ultrasound droplet ejectors
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Piezoelectrically actuated flextensional micromachined ultrasound droplet ejectors

机译：压电驱动的屈曲微机械超声液滴喷射器

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This paper reports a variation on the design of the flextensional transducer for use in ejecting liquids. The transducer is constructed by depositing a piezoelectric thin film to a thin, edge-clamped, circular annular plate. By placing a fluid behind one face of a vibrating compound plate that has an orifice at its center, we achieve continuous or drop-on-demand ejection of the fluid. We present results of ejection of water and isopropanol. The ejector is harmless to sensitive fluids and can be used to eject fuels as well as chemical and biological samples. Micromachined two-dimensional array piezoelectrically actuated flextensional droplet ejectors were realized using planar silicon micromachining techniques. Typical resonant frequency of the micromachined device ranges from 400 kHz to 4.5 MHz. The ejection of water through a 5-/spl mu/m diameter orifice at 3.5 MHz was demonstrated by using the developed micromachined two-dimensional array ejectors.
机译：本文报道了用于喷射液体的弯曲张力传感器设计的变化。通过将压电薄膜沉积到薄的，边缘固定的圆形环形板上来构造换能器。通过将流体放在中心有孔的振动复合板的一个表面后面，我们可以实现连续或按需喷射流体。我们介绍了水和异丙醇喷射的结果。喷射器对敏感液体无害，可用于喷射燃料以及化学和生物样品。使用平面硅微加工技术实现了微机械加工的二维阵列压电驱动的弯曲小滴喷射器。微机械设备的典型谐振频率范围为400 kHz至4.5 MHz。通过使用开发的微机械二维阵列喷射器证明了在3.5 MHz下通过直径为5 / splμm/ m的孔喷射水。

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