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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Ultrasonic transmission and reception from bulk-micromachinedtransducers
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Ultrasonic transmission and reception from bulk-micromachinedtransducers

机译：批量微机械换能器的超声波发射和接收

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摘要

Acoustic transduction in air from two bulk-micromachined siliconnstructures is investigated. Both contain silicon diaphragms of the ordernof 2 mm2 in close proximity to a metallized substrate. Onendiaphragm is mass-loaded; the other is not. Their resonant frequenciesn(70 and 360 kHz) are dominated by squeeze film trapping of ambient air,nand the Q of each device is about 8. The lower frequency (LF) device isncharacterized by electrical and acoustic measurements using a calibratednmicrophone. Novel diagnostic methods that exploit the nonlinear naturenof the transducer are described. The adequacy of calibration bynreciprocity is confirmed at 70 kHz and applied to the high frequencyndevice. An insertion loss of 19 dB is measured, which compares well withnreports of other silicon-based transducers. Observed losses arenaccounted for by squeeze-film damping applied to the diaphragm-substratengap. The ability to control the bandwidth by the squeeze film effect,ngood efficiency, and the relatively standard method of constructionncould make such ultrasonic transducers useful in specialist applications
机译：研究了来自两个本体微机械硅结构的空气中的声换能。两者都包含紧邻金属化衬底的2 mm2量级的硅膜片。内膜ph载。另一个不是。它们的共振频率（70和360 kHz）主要由周围空气的挤压薄膜捕获所决定，并且每个设备的Q约为8。低频（LF）设备的特点是通过使用校准的麦克风进行电学和声学测量。描述了利用换能器非线性特性的新型诊断方法。通过互易性进行校准的充分性在70 kHz时得到确认，并已应用于高频设备。测量的插入损耗为19 dB，与其他基于硅的换能器的报告没有很好的比较。观察到的损失是通过施加在膜片基片上的挤压膜阻尼来解决的。通过挤压膜效应来控制带宽的能力，良好的效率以及相对标准的构造方法，可能会使此类超声换能器在专业应用中有用

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