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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Properties of sensors based on shear-horizontal surface acousticwaves in LiTaO3/SiO2 and quartz/SiO2structures
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Properties of sensors based on shear-horizontal surface acousticwaves in LiTaO3/SiO2 and quartz/SiO2structures

机译：LiTaO3 / SiO2和石英/ SiO2结构中基于横剪面声波的传感器特性

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摘要

Acoustic wave devices based on waveguide modes withnshear-horizontal polarization, i.e., Love modes, are very promising fornsensor application, especially in liquid environments. They can be usednfor the determination of liquid density and viscosity as well as fornchemical sensors. Up to now, several systems have been reported based onnstandard ST quartz. Those devices lack temperature stability, which isnessential for field application. Thus, temperature-compensated systemsnbased on different Y-rotated quartz and lithium tantalate (LiTaO3n) plates with SiO2 guiding layers have beenninvestigated. Temperature behavior as well as relevant acousticnproperties were considered. Furthermore, experimentally determined datanfor device sensitivity are compared with theoretical predictions fromnnumerical calculations
机译：基于具有水平剪切极化的波导模式的声波设备，即Love模式，是非常有前途的传感器应用，特别是在液体环境中。它们可用于测定液体密度和粘度以及化学传感器。迄今为止，已经报道了几种基于标准ST石英的系统。这些设备缺乏温度稳定性，这对于现场应用而言至关重要。因此，已经研究了基于不同的Y旋转石英和钽酸锂（LiTaO3n）板并带有SiO2导向层的温度补偿系统。考虑了温度行为以及相关的声学特性。此外，将实验确定的设备灵敏度数据与数值计算的理论预测进行了比较

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