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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Optimal cut for leaky SAW on LiTaO3 for high performanceresonators and filters
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Optimal cut for leaky SAW on LiTaO3 for high performanceresonators and filters

机译：LiTaO3上泄漏SAW的最佳切割，适用于高性能谐振器和滤波器

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摘要

The paper describes how the characteristics of leaky surfacenacoustic wave (LSAW) propagation depend on the thickness of Al gratingnelectrodes on rotated Y-X LiTaO3. It is shown that thenpropagation loss arising from leaky nature changes parabolically withnboth the grating electrode thickness and rotation angle and becomes zeronwhen electrode thickness and rotation angle are properly determined.nThis means that even when thick grating electrodes are needed in devicendesign, zero propagation loss is always realized by properly determiningnthe rotation angle. When the grating electrode thickness is 0.07 to 0.1nin wavelength for example, LSAWs on 40-42°Y-X LiTaO3 givenzero propagation loss without deteriorating other characteristics.nLadder-type filters for the 800-MHz range were fabricated, whichnessentially need thick Al grating electrodes of about 0.1 wavelengthnthickness. As predicted by theoretical calculation, experimental resultsnshowed that if the rotation angle is increased to circa 42° from anconventional value of 38°, the insertion loss and shape factor arenmarkedly improved compared with devices based on 36°Y-X LiTaO3n. This is essentially a result of the minimized propagation loss
机译：本文描述了泄漏的表面声波（LSAW）传播特性如何取决于旋转的Y-X LiTaO3上的铝栅电极的厚度。结果表明，由泄漏性质引起的传播损耗随栅电极厚度和旋转角度的变化而呈抛物线变化，而在适当确定电极厚度和旋转角度时变为零。这意味着即使在器件设计中需要厚栅电极的情况下，传播损耗始终为零通过正确确定旋转角度可以实现例如，当光栅电极的厚度为0.07至0.1nin波长时，在40-42°YX的LiTaO3上的LSAW的传播损耗为零而又不降低其他特性。制造了800MHz范围的梯形滤波器，因此需要厚的Al光栅电极约0.1波长厚度如理论计算所预测的，实验结果表明，与基于36°Y-X LiTaO3n的器件相比，如果将旋转角从38°的常规值增加到大约42°，则插入损耗和形状因子将得到显着改善。这本质上是最小化传播损耗的结果

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