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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Theory and design of piezoelectric resonators immune toacceleration: present state of the art
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Theory and design of piezoelectric resonators immune toacceleration: present state of the art

机译：压电谐振器不受加速度影响的理论和设计：现有技术

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摘要

A typical low noise oscillator uses a crystal resonator as thenfrequency-determining element. An understanding of the fundamentalnnature of acceleration sensitivity in crystal oscillators residesnprimarily in understanding the behavior of the crystal resonator. Thendriving factor behind the acceleration-induced frequency shift is shownnto be deformation of the resonator. The deformation drives two effects:nan essentially linear change in the frequency-determining dimensions ofnthe resonator and an essentially nonlinear effect of changing thenvelocity of the propagating wave. In this paper, the fundamental naturenof acceleration sensitivity is reviewed and clarified, and attendantndesign guidance is developed for piezoelectric resonators. The basicnproperties of acceleration sensitivity and general design guidance arendeveloped through the simple examples of “bulk acoustic wave (BAW)nin a box” and “surface transverse wave (STW) in anbox.” These examples serve to clarify a number of concepts,nincluding the role of mode shape and the basic difference between thenBAW and STW cases. The design equations clarify the functionalndependencies of the acceleration sensitivities on the full range ofncrystal resonator design and fabrication parameters
机译：典型的低噪声振荡器使用晶体谐振器作为频率确定元件。对晶体振荡器中加速度敏感度基本原理的理解主要在于理解晶体谐振器的性能。然后，加速度引起的频移背后的驱动因素显示为谐振器的变形。形变驱动两个作用：谐振器的频率确定尺寸实际上发生线性变化，而传播波的速度变化则发生非线性变化。本文对加速度灵敏度的基本性质进行了回顾和阐明，并为压电谐振器制定了相应的设计指南。通过“盒子中的大声波”（BAW）和“盒子中的横波”（STW）的简单示例，可以开发出加速度敏感度的基本属性和一般设计指南。这些示例旨在阐明许多概念，包括模式形状的作用以及BAW和STW案例之间的基本区别。设计方程式阐明了加速度敏感度在整个n晶体谐振器设计和制造参数范围内的功能依赖性

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