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FFT-based analysis of periodic structures in microacoustic devices

机译:基于FFT的微声器件中的周期性结构分析

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摘要

Periodic structures utilized as transducer or reflector elements play an important role in microacoustic wave devices. Such structures can be described using approximate analytical models. However, to obtain the accuracy required for reliable device simulation, numerical methods have to be employed. In this contribution, we present an efficient numerical approach to calculate the dispersion curves associated with microacoustic modes propagating in periodic structures; the method is demonstrated for the case of Love wave modes. The computational efficiency is related to the utilization of the FFT algorithm in a hybrid Method of Moments (MoM)/Mode-Matching analysis. From the obtained dispersion curves, characteristic parameters such as the stopband width can be obtained which can be used in a coupling-of-modes (COM) model of the structure.
机译:用作换能器或反射器元件的周期性结构在微声波装置中起重要作用。可以使用近似分析模型来描述这种结构。但是,为了获得可靠的设备仿真所需的精度,必须采用数值方法。在这一贡献中,我们提出了一种有效的数值方法来计算与在周期性结构中传播的微声模式相关的色散曲线。该方法在Love Wave模式的情况下得到了证明。计算效率与矩量法(MoM)/模式匹配分析的混合方法中FFT算法的利用有关。从获得的色散曲线,可以获得诸如阻带宽度的特征参数,该特征参数可用于结构的模式耦合(COM)模型中。

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