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Design and fabrication of a high performance multilayer piezoelectric actuator with bending deformation

机译:具有弯曲变形的高性能多层压电致动器的设计与制造

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摘要

A new bending mode multimorph actuator was designed and fabricated successfully by a multiple screen printing process. Unlike the conventional bimorph actuator in which the bend occurs in the thickness direction, the bend in the multimorph actuator occurs in the widthwise direction because of synchronistical deformation of each single monolithic layer in the multilayer structure. The theoretical analysis and experimental measurements were conducted to study the performance of this type of actuator, and a comparison was made with the conventional bimorph actuator. Larger displacement, higher resonance frequency, and much larger blocking force could be achieved with the multimorph actuator than with a bimorph actuator of similar dimensions. The multimorph actuator presented in this paper provides a valuable alternative for actuator applications beyond those available with the popular bimorph and longitudinal multilayer actuators.
机译:通过多丝网印刷工艺成功设计并制造了一种新型的弯曲模式多晶型致动器。与其中在厚度方向上发生弯曲的常规双压电晶片致动器不同,由于多层结构中每个单个整体层的同步变形,多晶致动器中的弯曲在宽度方向上发生。进行了理论分析和实验测量,以研究这种类型的执行器的性能,并与传统的双压电晶片执行器进行了比较。与类似尺寸的双压电晶片执行器相比,与多压电晶片执行器相比,可以实现更大的位移,更高的共振频率和更大的阻挡力。本文介绍的多晶型执行器为执行器应用提供了有价值的替代方案,而流行的双晶执行器和纵向多层执行器除外。

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