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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Theoretical and experimental study of mass sensitivity of PSAW-APMs on ZX-LiNbO/sub 3/
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Theoretical and experimental study of mass sensitivity of PSAW-APMs on ZX-LiNbO/sub 3/

机译：PSAW-APM对ZX-LiNbO / sub 3 /的质量敏感性的理论和实验研究

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摘要

Acoustic plate mode (APM) devices have recently been used as sensing elements, both for the physical measurement of fluid properties and in biosensor applications. One of the primary interaction mechanisms in these devices is mass loading caused by the added mass bound to the layered crystal surface. However, the material properties of these thin composite layers are not well characterized or known as is required in order to accurately predict the sensor response. In the present work, perturbation theory is used to derive expressions for the sensitivity of the APM sensors to mass loading and viscoelastic stiffening. Mass sensitivity experiment was conducted on ZX-LiNbO/sub 3/ in a liquid environment to accurately reflect the sensitivity of an actual biosensor and the results are compared to theory. The measured data show a f/sup 2/ dependence for the mass sensitivity for APMs on ZX-LiNbO/sub 3/ in the measured frequency range, which indicates a SAW-like behavior. This behavior is due to the fact that the acoustic plate modes on ZX-LiNBO/sub 3/ are pseudo-SAW (PSAW) derived, and the acoustic energy is confined to the sensing surface. As a result, the APMs on ZX-LiNbO/sub 3/ are referred to as PSAW-APMs. Discussions are given in terms of the added mass which occurs in typical biosensor applications.
机译：声学板模式（APM）设备最近已用作传感元件，既用于流体性质的物理测量，又用于生物传感器应用。这些设备中的主要相互作用机制之一是由绑定到分层晶体表面的附加质量引起的质量负载。然而，这些薄的复合层的材料特性没有被很好地表征或已知，以便准确地预测传感器响应。在目前的工作中，使用扰动理论来推导APM传感器对质量载荷和粘弹性刚度的敏感性表达式。在ZX-LiNbO / sub 3 /上在液体环境中进行了质量敏感度实验，以准确反映实际生物传感器的敏感度，并将结果与​​理论进行比较。测量的数据显示，在测量的频率范围内，APM的质量灵敏度对ZX-LiNbO / sub 3 /具有f / sup 2 /依赖性，这表明类SAW行为。此行为是由于以下事实：ZX-LiNBO / sub 3 /上的声板模式是伪SAW（PSAW）派生的，并且声能被限制在传感表面上。结果，将ZX-LiNbO / sub 3 /上的APM称为PSAW-APM。讨论了在典型的生物传感器应用中出现的附加质量。

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