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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Characteristic parameters of surface acoustic waves in a periodic metal grating on a piezoelectric substrate
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Characteristic parameters of surface acoustic waves in a periodic metal grating on a piezoelectric substrate

机译：压电基板上周期性金属光栅中的表面声波的特征参数

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摘要

The coupling problem between electrodes due to the propagation of acoustic waves in a periodic metal grating on a piezoelectric substrate is theoretically studied. A method for the determination of the mutual admittance between the grating electrodes is presented, and an analytical expression for the contribution of surface acoustic waves (SAWs) is proposed. The SAW characteristic parameters are determined with a numerical technique that is able to deal with a leaky SAW as well as a true SAW (conventional Rayleigh type or Bleustein-Gulyaev type). Using this technique, the SAWs' contribution to the mutual admittance can be removed, and the analysis of other contributions becomes possible. In particular, the amplitude decay rate of the residual mutual admittance with electrode separation gives information about the propagation of the surface skimming bulk waves (SSBWs). The method presented is applied to several currently used material-cut configurations.
机译：理论上研究了由于声波在压电基板上的周期性金属光栅中的传播而引起的电极之间的耦合问题。提出了确定光栅电极间互导率的方法，并提出了声表面波（SAWs）的贡献的解析表达式。 SAW特征参数通过能够处理泄漏SAW以及真实SAW（常规瑞利型或Bleustein-Gulyaev型）的数值技术确定。使用这种技术，可以消除声表面波对互导的贡献，并且可以分析其他贡献。尤其是，剩余互导随电极间距的振幅衰减率给出了有关表面掠过体波（SSBW）传播的信息。提出的方法适用于几种当前使用的材料切割配置。

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